FLUID DISCHARGING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING SAME, AND FLUID DISCHARGING METHOD THEREOF

FLUID DISCHARGING DEVICE, SUBSTRATE PROCESSING SYSTEM INCLUDING SAME, AND FLUID DISCHARGING METHOD THEREOF

A fluid discharging device includes a body member including an entrance configured to receive fluid and a passage line through which the fluid is transferred to a chamber, and a first foreign material removing unit coupled to the body member, and expanding and restoring such that foreign materials a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JUNG, Woo Sin, NOH, Sang Eun, KIM, Dae Sung
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A fluid discharging device includes a body member including an entrance configured to receive fluid and a passage line through which the fluid is transferred to a chamber, and a first foreign material removing unit coupled to the body member, and expanding and restoring such that foreign materials accumulated on a surface of the first foreign material removing unit is removed.