PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

A plasma processing method includes: supplying a gas into a processing container; and intermittently supplying microwave powers output from a plurality of microwave introducing modules into the processing container. In the intermittently supplying the microwave powers, the supply of all the microwav...

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Bibliographische Detailangaben

Hauptverfasser:	ASHIDA, Mitsutoshi, UEDA, Hirokazu, KAMATA, Eiki, GUNJI, Isao, IKEDA, Taro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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