SENSOR ELEMENT

A sensor element includes a first diaphragm for measuring differential pressure between first pressure and second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The sensor element has a first pressure introduction path (through holes, a groov...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yoneda, Masayuki, Kida, Nozomi, Tokuda, Tomohisa, Tsushima, Ayumi, Tojo, Hirofumi
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A sensor element includes a first diaphragm for measuring differential pressure between first pressure and second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The sensor element has a first pressure introduction path (through holes, a groove, and a depression) through which the first pressure is transmitted to the first diaphragm. The sensor element has a second pressure introduction path (through holes, grooves, and depressions) through which the second pressure is transmitted to the first and second diaphragms. The sensor element has a liquid amount adjustment chamber (depression) configured to make an amount of a first pressure transmission medium filled in the first pressure introduction path and an amount of a second pressure transmission medium filled in the second pressure introduction path to be equal to each other.