Via Rail Structure

The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC design layout defining a semiconductor structure having a via rail extending lengthwise in a first direction and contacting a source contact extending lengthwise in a second direc...

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Bibliographische Detailangaben
Hauptverfasser: Hsueh, Wang-Jung, Hsieh, Tung-Heng, Wang, Sheng-Hsiung, Kuang, Hao, Young, Bao-Ru, Wu, Pang-Chi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides a method for fabricating an integrated circuit (IC). The method includes receiving an IC design layout defining a semiconductor structure having a via rail extending lengthwise in a first direction and contacting a source contact extending lengthwise in a second direction perpendicular to the first direction. The method further includes identifying the via rail, the source contact, a drain contact being distanced away from the source contact, and a gate structure interposing the source and drain contacts using pattern recognition on the IC design layout. The method further includes determining a position, length, and width of a jog via to be added to the IC design layout. The method further includes adding the jog via having the pre-determined length and width to the IC design layout at the pre-determined position to provide a modified IC design layout and generating a tape-out for fabricating a modified mask.