PROBE SYSTEMS FOR OPTICALLY PROBING A DEVICE UNDER TEST AND METHODS OF OPERATING THE PROBE SYSTEMS

PROBE SYSTEMS FOR OPTICALLY PROBING A DEVICE UNDER TEST AND METHODS OF OPERATING THE PROBE SYSTEMS

Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Rishavy, Daniel, Negishi, Kazuki, Simmons, Michael E, Christenson, Eric Robert, Frankel, Joseph George
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.