MICROMECHANICAL INERTIAL SENSOR

A micromechanical inertial sensor that includes a substrate, and at least two identical z sensor cores, each including a movable asymmetrical seismic mass. The movable asymmetrical seismic masses are each twistable about a torsion axis. The two z sensor cores are situated on the substrate rotated by...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Koster, Monika, Kiesel, Stefan, Beintner, Jochen
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A micromechanical inertial sensor that includes a substrate, and at least two identical z sensor cores, each including a movable asymmetrical seismic mass. The movable asymmetrical seismic masses are each twistable about a torsion axis. The two z sensor cores are situated on the substrate rotated by 180° relative to one another.