SLOT-DIE COATING APPARATUS AND SLOT-DIE COATING METHOD

A slot-die coating apparatus for manufacturing a patterned coating layer (3) on a substrate surface (1s) of a substrate (1) comprises a slot-die coating head (2), a controlled coating fluid supply system (7) and a substrate carrier (6) for carrying the substrate (1). The slot-die coating head (2) co...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: de Vries, Ike Gerke, Groen, Wihelm Albert
Format: Patent
Sprache:eng
Schlagworte:
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