SLOT-DIE COATING APPARATUS AND SLOT-DIE COATING METHOD

A slot-die coating apparatus for manufacturing a patterned coating layer (3) on a substrate surface (1s) of a substrate (1) comprises a slot-die coating head (2), a controlled coating fluid supply system (7) and a substrate carrier (6) for carrying the substrate (1). The slot-die coating head (2) comprises an inlet (21) for receiving coating fluid from the coating fluid supply system and a slit-shaped outflow opening (22) that is communicatively coupled to the inlet and has a slit direction. The controlled coating fluid supply system (7) alternately operates in a first mode (M1) to provide for a flow of coating fluid out of the slit-shaped outflow opening (22) for deposition on the substrate surface and in a second mode (M2) wherein a deposition of coating fluid out of the slit-shaped outflow opening (22) on the substrate surface is interrupted (21). The coating head (2) has an internal coating fluid trajectory extending from the inlet (21) to the slit-shaped outflow opening (22). In a stream-downwards order, the coating fluid trajectory comprises a lateral distribution portion (23) to distribute a flow of fluid over said slit direction, a collection channel (24) extending transverse to the stream-downwards direction, and a flow resistive output portion (25). Upon a transition from the first mode (M1) to the second mode (M2) the coating fluid supply system (7) sucks coating fluid from at least one outlet (26) of the slot-die coating head (2) that is communicatively coupled to the collection channel (24).