SENSOR BODY HAVING A MEASURING ELEMENT AND METHOD FOR MANUFACTURING FOR A SENSOR BODY

A sensor body for receiving a pressurized fluid or for absorbing a force, having a membrane and at least one strain sensitive measuring element disposed on the membrane, comprising, a semiconductor substrate and at least one piezo resistive resistance track, wherein the resistance track is formed in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROTHER, Andre, WILL, Alexander, PLEYER, Juergen, STICH, Achim
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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