SENSOR BODY HAVING A MEASURING ELEMENT AND METHOD FOR MANUFACTURING FOR A SENSOR BODY

A sensor body for receiving a pressurized fluid or for absorbing a force, having a membrane and at least one strain sensitive measuring element disposed on the membrane, comprising, a semiconductor substrate and at least one piezo resistive resistance track, wherein the resistance track is formed in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ROTHER, Andre, WILL, Alexander, PLEYER, Juergen, STICH, Achim
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A sensor body for receiving a pressurized fluid or for absorbing a force, having a membrane and at least one strain sensitive measuring element disposed on the membrane, comprising, a semiconductor substrate and at least one piezo resistive resistance track, wherein the resistance track is formed in the semiconductor substrate by means of doping. According to the invention, the measuring element is connected to the membrane by means of a lead-free glass solder and the measuring element is arranged, at least in sections, sunk into the glass solder. A measuring element, a pressure sensor, a force measuring device, a method for manufacturing a sensor body and the use of a measuring element is also provided.