Self-Mixing Interferometry-Based Absolute Distance Measurement with Distance Reference

A device includes a first component, a second component having a reconfigurable distance from the first component, an optical element, an SMI sensor, and a processor. The optical element has a fixed relationship with respect to the first component, and has a known optical thickness between a first s...

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Bibliographische Detailangaben
Hauptverfasser: Mutlu, Mehmet, Cihan, Ahmet Fatih
Format: Patent
Sprache:eng
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