PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

PARTICLE DENSITY SENSOR USING EVANESCENT WAVE OF WAVEGUIDE

The particle sensor device comprises a substrate, a photodetector, a dielectric on or above the substrate, a source of electromagnetic radiation, and a through-substrate via in the substrate. The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide is arrang...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PIRES SINGULANI, Anderson, Röhrer, Georg, MAIERHOFER, Paul, CASTANO SANCHEZ, Fernando Jesus, Kraft, Jochen
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The particle sensor device comprises a substrate, a photodetector, a dielectric on or above the substrate, a source of electromagnetic radiation, and a through-substrate via in the substrate. The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion of the waveguide. A further portion of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.