CALIBRATION METHOD OF X-RAY MEASURING DEVICE

A calibration method of an X-ray measuring device includes: mounting a calibration tool on a rotating table; a moving position acquisition step of parallelly moving a position of an j-th sphere with respect to a position of a first sphere, irradiating the calibration tool with an X-ray, and acquiring, form an output of an X-ray image detector, a moving position Mj where the magnitude of a differential position Erj of a centroid position ImDisjh_Sphr_j of a projected image of the j(2≤j≤N)-th sphere with respect to a centroid position ImDis1_Sphr_1 of a projected image of the first sphere becomes equal to or less than a specified value Vx; a relative position calculation step of performing the moving position acquisition step on the remaining spheres a feature position calculation step; a transformation matrix calculation step; a rotation detection step; a position calculation step; and a center position calculation step.