SCANNING ELECTRON MICROSCOPE APPARATUS AND OPERATION METHOD THEREOF

A scanning electron microscope apparatus including an electron gun configured to generate an electron beam, a focusing lens configured to concentrate the electron beam from the electron gun, an electron detector configured to detect signals emitted from a sample in response to the electron beam inci...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIM, Sangkyo, CHO, Yongmin, LEE, Taeyong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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