SCANNING ELECTRON MICROSCOPE APPARATUS AND OPERATION METHOD THEREOF

SCANNING ELECTRON MICROSCOPE APPARATUS AND OPERATION METHOD THEREOF

A scanning electron microscope apparatus including an electron gun configured to generate an electron beam, a focusing lens configured to concentrate the electron beam from the electron gun, an electron detector configured to detect signals emitted from a sample in response to the electron beam inci...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIM, Sangkyo, CHO, Yongmin, LEE, Taeyong
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A scanning electron microscope apparatus including an electron gun configured to generate an electron beam, a focusing lens configured to concentrate the electron beam from the electron gun, an electron detector configured to detect signals emitted from a sample in response to the electron beam incident on the sample, a stage configured to receive the sample thereon, and a focus calibration structure on an upper part of the stage.