PRESSURE DETECTION ELEMENT AND PRESSURE DETECTION APPARATUS

PRESSURE DETECTION ELEMENT AND PRESSURE DETECTION APPARATUS

A pressure detection element includes a substrate, first and second electrodes on the substrate, a membrane including a first diaphragm portion and a second diaphragm portion and spaced from the substrate, and a spacer between the substrate and the membrane to define a first space in which the first...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HAMAZAKI, Ryohei, TSUJI, Daiki
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A pressure detection element includes a substrate, first and second electrodes on the substrate, a membrane including a first diaphragm portion and a second diaphragm portion and spaced from the substrate, and a spacer between the substrate and the membrane to define a first space in which the first electrode and the first diaphragm portion are spaced from and opposed to each other and a second space in which the second electrode and the second diaphragm portion are spaced from and opposed to each other. The substrate includes a trench in a portion positioned between the first diaphragm portion and the second diaphragm portion when viewed in a direction in which the substrate and the membrane are opposed.