OPTICAL DEVICE AND ARTICLE MANUFACTURING METHOD

In an optical device capable of adjusting a focal position of laser light, the accuracy of laser processing is improved. An optical device which processes a subject by irradiating the subject with laser light, includes: a focal position adjustment mechanism configured to adjust a focal position of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Inoue, Yukihiro
Format: Patent
Sprache:eng
Schlagworte:
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