OPTICAL DEVICE AND ARTICLE MANUFACTURING METHOD

In an optical device capable of adjusting a focal position of laser light, the accuracy of laser processing is improved. An optical device which processes a subject by irradiating the subject with laser light, includes: a focal position adjustment mechanism configured to adjust a focal position of t...

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Bibliographische Detailangaben
1. Verfasser:	Inoue, Yukihiro
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	In an optical device capable of adjusting a focal position of laser light, the accuracy of laser processing is improved. An optical device which processes a subject by irradiating the subject with laser light, includes: a focal position adjustment mechanism configured to adjust a focal position of the laser light; an incident position adjustment mechanism configured to adjust an incident position of the laser light incident on the subject in a direction perpendicular to a focal direction of the laser light; and a control unit configured to control driving of the focal position adjustment mechanism and the incident position adjustment mechanism, wherein the control unit controls the driving of the incident position adjustment mechanism based on an amount of driving of the focal position adjustment mechanism to correct a shift of the incident position due to change of the focal position.