INSPECTION SYSTEM, INSPECTION APPARATUS, AND INSPECTION METHOD

An inspection system for inspecting a target includes a first lighting device configured to irradiate light onto the target from a given direction; a second lighting device, provided between the target and the first lighting device, configured to irradiate light onto the target from an oblique direc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Kamada, Takuji, Nakashige, Fumihiro
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection system for inspecting a target includes a first lighting device configured to irradiate light onto the target from a given direction; a second lighting device, provided between the target and the first lighting device, configured to irradiate light onto the target from an oblique direction with respect to the given direction; an image capture device, provided at a position opposite to a position of the target with respect to the first lighting device and the second lighting device in the given direction; and circuitry configured to acquire a first inspection target image of the target, captured by the image capture device by irradiating the light from the first lighting device, and a second inspection target image of the target, captured by the image capture device by irradiating the light from the second lighting device, to be used for inspecting the target.