Methods and Devices Related to Radio Frequency Devices

Methods and Devices Related to Radio Frequency Devices

A method includes providing a semiconductor substrate having a first side and a second side opposite to the first side, forming at least one radio frequency device at the first side; thinning the semiconductor substrate from the second side; and processing the second side of the thinned semiconducto...

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Hauptverfasser: Feick, Henning, Cattaneo, Andrea, Taddiken, Hans, Seidel, Uwe, Solomko, Valentyn, Heiss, Dominik, Butschkow, Christian, Kadow, Christoph, Steltenpohl, Anton
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Feick, Henning
Cattaneo, Andrea
Taddiken, Hans
Seidel, Uwe
Solomko, Valentyn
Heiss, Dominik
Butschkow, Christian
Kadow, Christoph
Steltenpohl, Anton
description A method includes providing a semiconductor substrate having a first side and a second side opposite to the first side, forming at least one radio frequency device at the first side; thinning the semiconductor substrate from the second side; and processing the second side of the thinned semiconductor substrate to reduce leakage currents or to improve a radio frequency linearity of the at least one radio frequency device.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Methods and Devices Related to Radio Frequency Devices
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