SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

A semiconductor device is provided. The semiconductor device includes a substrate a bit line structure disposed on the substrate, a trench adjacent to at least one side of the bit line structure, a storage contact structure disposed within the trench, and comprising a storage contact, a silicide lay...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yoo, Won Seok, Park, So Hyun, Kim, Keun Nam, Hwang, Yoo Sang, PARK, Tae Jin, Kim, Hyo-Sub, Heo, In Kyoung
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
INFORMATION STORAGE
PHYSICS
STATIC STORES
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Beschreibung
Zusammenfassung:A semiconductor device is provided. The semiconductor device includes a substrate a bit line structure disposed on the substrate, a trench adjacent to at least one side of the bit line structure, a storage contact structure disposed within the trench, and comprising a storage contact, a silicide layer, and a storage pad which are stacked sequentially. A spacer structure is disposed between the bit line structure and the storage contact structure.