INTEGRATED SYSTEM AND METHOD

A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.

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Bibliographische Detailangaben
Hauptverfasser:	Goren, Zvi, Merry, Nir, Elichai, Rami, Krivts (Krayvitz), Igor, Uziel, Yoram, Mariasin, Albert
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method and an integrated system. The integrated system can include an optical inspection unit, a charged particle device, an interface unit, and at least one controller.