A HOLDING SYSTEM FOR SUPPORTING A WAFER AND AN OPTICAL ELEMENT CONFORMED SO AS TO FORM AN OPTICAL SYSTEM AND A METHOD FOR FORMING SUCH OPTICAL SYSTEM

Disclosed is a holding system for supporting a wafer having a first surface, a second surface and a third surface joining the first and second surfaces, and an optical element having a first surface, a second surface and a third surface joining the first and second surfaces, the holding system inclu...

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Bibliographische Detailangaben
Hauptverfasser:	MEYNEN, Mathieu, JOUARD, Ludovic, UHALTE NOGUES, Sira
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICS PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Disclosed is a holding system for supporting a wafer having a first surface, a second surface and a third surface joining the first and second surfaces, and an optical element having a first surface, a second surface and a third surface joining the first and second surfaces, the holding system including: a support including first support unit configured to support the second and/or third surface of the wafer and second support unit configured to support the second and/or third surface of the optical element; a positioning unit configured to position the second surface of the wafer relative to the first surface of the optical element; and a mechanical unit configured to move the first and second support units one relative to the other so as to move the second surface of the wafer and the first surface of the optical element to form an optical system.