INSPECTION DEVICE, INSPECTION METHOD, AND COMPUTER READABLE MEDIUM

A correlation value calculation unit calculates a correlation value between input data input to an inspection-targeted apparatus whose internal specifications are unknown and output data for the input data from the inspection-targeted apparatus. A state transition determination unit analyzes in a ti...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAMOTO, Takumi, NISHIKAWA, Hiroki, KAWAUCHI, Kiyoto, KITO, Keisuke
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A correlation value calculation unit calculates a correlation value between input data input to an inspection-targeted apparatus whose internal specifications are unknown and output data for the input data from the inspection-targeted apparatus. A state transition determination unit analyzes in a time-series manner, a plurality of correlation values calculated by the correlation value calculation unit for a plurality of pieces of input data and a plurality of pieces of output data for the plurality of pieces of input data, and determines whether or not a state transition has occurred in the inspection-targeted apparatus.