REACTION CHAMBER COMPONENT, PREPARATION METHOD, AND REACTION CHAMBER

A reaction chamber component includes a body made of a 5000-series aluminum alloy material and an oxide film layer disposed on a surface-to-be-covered of the body.

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Bibliographische Detailangaben
Hauptverfasser:	PENG, Yulin, LI, Yicheng, CAO, Yongyou
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A reaction chamber component includes a body made of a 5000-series aluminum alloy material and an oxide film layer disposed on a surface-to-be-covered of the body.