DISPERSION LIQUID OF SILICA PARTICLES AND PRODUCTION METHOD THEREFOR

DISPERSION LIQUID OF SILICA PARTICLES AND PRODUCTION METHOD THEREFOR

Provided is a dispersion liquid of silica particles, comprising silica particles having an average particle diameter of 5 to 300 nm determined from an electron micrograph and a density of 1.20 g/cm3 or more determined from a specific surface area determined by a BET method using nitrogen adsorption,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUMAZAWA, Mitsuaki, ARAKANE, Hirotada, MURAGUCHI, Ryo, HIRAI, Toshiharu, EGAMI, Miki
Format: Patent
Sprache:eng
Schlagworte:
ADHESIVES
CHEMISTRY
COMPOUNDS THEREOF
DYES
INORGANIC CHEMISTRY
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
NON-METALLIC ELEMENTS
PAINTS
POLISHES
POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH
SKI WAXES
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Beschreibung
Zusammenfassung:Provided is a dispersion liquid of silica particles, comprising silica particles having an average particle diameter of 5 to 300 nm determined from an electron micrograph and a density of 1.20 g/cm3 or more determined from a specific surface area determined by a BET method using nitrogen adsorption, wherein the dispersion liquid has a pH of less than 8, a silica concentration of 12 to 40% by mass, and a viscosity in terms of a silica concentration of 20% by mass of 40 mPa·s or less. When this silica particle is used as an abrasive, it is possible to realize a sufficient polishing speed and a smooth polished surface on which occurrence of scratches is suppressed.