SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBSTRATE COOLING
A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of ali...
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| creator | Stone, Dale K Sun, Dawei Lischer, D. Jeffrey Anella, Steven Serisky, Ron Hall, Daniel A Stone, Lyudmila Blake, Julian G Bettencourt, Robert H |
| description | A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes. |
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The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBSTRATE COOLING |
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