SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBSTRATE COOLING

A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of ali...

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Bibliographische Detailangaben
Hauptverfasser:	Stone, Dale K, Sun, Dawei, Lischer, D. Jeffrey, Anella, Steven, Serisky, Ron, Hall, Daniel A, Stone, Lyudmila, Blake, Julian G, Bettencourt, Robert H
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A heating system for heating a substrate. The heating system may include a susceptor, where the susceptor has a substrate support surface. The heating system may further include a heat transfer layer, disposed on the substrate support surface, where the heat transfer layer comprising an array of aligned carbon nanotubes.