SEMICONDUCTOR INTEGRATED CIRCUIT AND CIRCUIT LAYOUT METHOD THEREOF

A semiconductor integrated circuit comprises a semiconductor substrate having a via-hole, a front-side-metal layer formed on a top surface of the semiconductor substrate, a seed-metal layer and a backside-metal layer. A bottom surface of an inner surface of the via-hole is at least partially defined by the front-side-metal layer. A surrounding surface of the inner surface of the via-hole is at least partially defined by the semiconductor substrate. The seed-metal layer is formed on the inner surface of the via-hole and a bottom surface of the semiconductor substrate such that the seed-metal layer and the front-side-metal layer are connected. The backside-metal layer is formed on an outer surface of the seed-metal layer. An aspect ratio of the via-hole is greater than or equal to 0.2 and less than or equal to 3, thereby a thickness uniformity of the backside-metal layer is improved.