SUBSTRATE CONVEYING ROBOT AND SUBSTRATE CONVEYING METHOD

A robot control unit for a substrate conveying robot raises a hand from a first lower position below a first target position at which the hand picks up a substrate to a first upper position above the first target position, and displaces at least one of a plurality of joints in one direction, in a fi...

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Bibliographische Detailangaben
Hauptverfasser:	BHARWANI, Avish Ashok, YOSHIDA, Masaya, LE, Ryan, LEE, Brandon, ZENG, Ming
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A robot control unit for a substrate conveying robot raises a hand from a first lower position below a first target position at which the hand picks up a substrate to a first upper position above the first target position, and displaces at least one of a plurality of joints in one direction, in a first interval from the first lower position to a first intermediate position between the first lower position and the first target position.