Pressure Sensor System Having Protection Against Freezing Medium
A pressure sensor system is disclosed. In an embodiment, a pressure sensor system includes a pressure sensor element with a flexible plate, wherein the pressure sensor element is a piezoresistive sensor element and a support element on which the pressure sensor element is arranged, wherein a flow ch...
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Zusammenfassung: | A pressure sensor system is disclosed. In an embodiment, a pressure sensor system includes a pressure sensor element with a flexible plate, wherein the pressure sensor element is a piezoresistive sensor element and a support element on which the pressure sensor element is arranged, wherein a flow channel configured to supply a medium to the flexible plate runs in the support element, wherein the flow channel has at least one sub-section, a longitudinal direction of which running perpendicularly below the flexible plate, and wherein a channel cross section of the at least one sub-section of the flow channel is at no point within the sub-section of the flow channel smaller than an area of the flexible plate. |
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