POINT-OF-USE DYNAMIC CONCENTRATION DELIVERY SYSTEM WITH HIGH FLOW AND HIGH UNIFORMITY

A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configure...

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Bibliographische Detailangaben
Hauptverfasser: Jacobson, Norman, DeVilliers, Anton, Huli, Lior, Grootegoed, James, NASMAN, Ronald W, Robison, Rodney
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.