GALVANO DEVICE AND LASER MACHINING APPARATUS
A galvano device that rotates a mirror provided at a motor shaft by rotating a motor and changes a direction of light by allowing the mirror to reflect the light includes a sensor configured to detect a rotation angle of a motor rotating shaft and a filter configured to estimate a rotation angle of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A galvano device that rotates a mirror provided at a motor shaft by rotating a motor and changes a direction of light by allowing the mirror to reflect the light includes a sensor configured to detect a rotation angle of a motor rotating shaft and a filter configured to estimate a rotation angle of the mirror from a value output from the sensor. The rotation angle of the mirror is output from the filter. |
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