OPTICAL MEASURING DEVICE AND OPTICAL MEASURING METHOD

An optical measuring device includes: an emission device configured to emit a scanning light, of which an optical axis parallely moves, to an object; a light receiving element configured to perform photoelectric conversion with respect to the scanning light after passing over the object; a calculati...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TANIGUCHI, Ichiro, IMAIZUMI, Ryoichi
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An optical measuring device includes: an emission device configured to emit a scanning light, of which an optical axis parallely moves, to an object; a light receiving element configured to perform photoelectric conversion with respect to the scanning light after passing over the object; a calculation device configured to calculate, from a voltage wave obtained from time change of an electrical signal that is output by the light receiving element, a distance corresponding to a time range from a first edge with respect to a voltage value where the scanning light is not interrupted by the object and a second edge with respect to a voltage value where the scanning light is interrupted by the object, when a part of the scanning light is interrupted by the object for the time range.