Buk Acoustic Wave Resonator with Guard Rings having Recessed Space from Electrode Edge and Periodic Designs

Buk Acoustic Wave Resonator with Guard Rings having Recessed Space from Electrode Edge and Periodic Designs

A micromechanical system (MEMS) acoustic wave resonator is formed on a base substrate. A piezoelectric member is mounted on the base substrate. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dellas, Nicholas Stephen, Jackson, Ricky Alan, Goodlin, Brian, Yen, Ting-Ta
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Beschreibung
Zusammenfassung:A micromechanical system (MEMS) acoustic wave resonator is formed on a base substrate. A piezoelectric member is mounted on the base substrate. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge. A first guard ring is positioned on the second electrode spaced apart from the perimeter edge of the second electrode.