METAL-OXIDE-SEMICONDUCTOR TRANSISTOR AND METHOD OF FABRICATING THE SAME

A metal-oxide-semiconductor (MOS) transistor includes a substrate. The substrate has a plurality of trenches extending along a first direction and located on a top portion of the substrate. A gate structure line is located on the substrate and extends along a second direction intersecting with the f...

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Bibliographische Detailangaben
Hauptverfasser: Chen, Kuang-Hsiu, Hu, Kai-Ting, Chung, Sheng-Chen, Li, Yan-Huei, Kuo, Chen-An, Lee, Chiu-Te, Wang, Chih-Chung, Huang, Liang-An, HSU, HSIANG-HUA, Lin, Ke-Feng
Format: Patent
Sprache:eng
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Zusammenfassung:A metal-oxide-semiconductor (MOS) transistor includes a substrate. The substrate has a plurality of trenches extending along a first direction and located on a top portion of the substrate. A gate structure line is located on the substrate and extends along a second direction intersecting with the first direction and crossing over the trenches. A first doped line is located in the substrate, located at a first side of the gate structure line, and crosses over the trenches. A second doped line is located in the substrate, located at a second side of the gate structure line, and crosses over the trenches.