MASK PLATE

A mask plate is provided according to the present disclosure. The mask plate includes: a fully-transparent region; a fully-opaque region; and a partially-transparent region at a boundary between the fully-transparent region and the fully-opaque region.

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Bibliographische Detailangaben
Hauptverfasser: ZHANG, Xinjie, CHEN, Hao, WU, Siquan
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A mask plate is provided according to the present disclosure. The mask plate includes: a fully-transparent region; a fully-opaque region; and a partially-transparent region at a boundary between the fully-transparent region and the fully-opaque region.