Pressure Measurement at a Test Gas Inlet

A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump, having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the te...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Bruhns, Hjalmar, Moser, Norbert, Gerdau, Ludolf, Wetzig, Daniel, Schmitz, Günter
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump, having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the test gas inlet, and wherein the inlet of the pre-vacuum pump and at least one intermediate inlet of the high vacuum pump are connected to each other by a connection line comprising a flow throttle.