INSPECTING APPARATUS

An inspection apparatus is provided with a holder configured to set an inspection target thereon, the inspection target configured to detect a contact position on the inspection target touched by a human finger; pseudo finger(s) configured to be detected as the human finger upon contact with the ins...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAKAMOTO, Koji, MATSUKAWA, Toshihide, IWAMI, Koji, FUJITA, Shigeki, HIKITA, Osamu
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An inspection apparatus is provided with a holder configured to set an inspection target thereon, the inspection target configured to detect a contact position on the inspection target touched by a human finger; pseudo finger(s) configured to be detected as the human finger upon contact with the inspection target; a positioner configured to move the pseudo finger(s) relative to the inspection target and to change the contact position of the pseudo finger(s) relative to the inspection target; a memory configured to store, respectively, a value of a pressing force in a range of pressing forces said range including a zero pressing force for each of the pseudo finger(s) on the inspection target; a controller configured to regulate the pressing force for pseudo finger(s) of the pseudo finger(s) based on the respective value; and a sensor configured to acquire an electric signal output from the inspection target.