Tungsten Hexafluoride Production Method

According to the present invention, there is provided a method of producing tungsten hexafluoride by reacting tungsten with a fluorine-containing gas at a temperature of 800° C. or higher. The method according to the present invention is advantageous in that the amount of production of the tungsten hexafluoride per unit capacity of the reaction vessel is increased as compared to conventional techniques of producing tungsten hexafluoride from a fluorine-containing gas and metal tungsten while controlling the reaction temperature to 400° C. or lower. It is preferable that the reaction vessel is equipped with a coolant jacket for maintaining an inner wall temperature of the reaction vessel at 400° C. or lower.