CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm i...

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Bibliographische Detailangaben
Hauptverfasser:	MORI, Kazumasa, YAMAGISHI, Wataru, ETO, Shunichi
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE LIME, MAGNESIA MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY PHYSICS REFRACTORIES SLAG TESTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.