POLISHING DEVICE

A polishing device includes shape following sections opposing a workpiece with a polishing body interposed between the shape following sections and the workpiece, and each including a displaceable shaft section. At least two of the shaft sections adjacent to each other are coupled via a link member....

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Takahashi, Naoki, Imanishi, Hideaki, Nakazono, Daisuke
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A polishing device includes shape following sections opposing a workpiece with a polishing body interposed between the shape following sections and the workpiece, and each including a displaceable shaft section. At least two of the shaft sections adjacent to each other are coupled via a link member. For example, when one of the shaft sections of the shape following sections coupled via the link member retracts by receiving a reaction force from the workpiece, the other of the shaft sections advances.