PLASMA GENERATOR MODULE

In an array of a plurality of plasma generator modules for generating a physical plasma by dielectric barrier discharges at atmospheric pressure, each of the plasma generator modules comprises two parallel electrodes linearly extending at a lateral distance, one of which having a dielectric barrier;...

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Bibliographische Detailangaben
Hauptverfasser: Gredner, Alexander, Wieneke, Stephan, Freier, Daniel, Vioel, Wolfgang
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In an array of a plurality of plasma generator modules for generating a physical plasma by dielectric barrier discharges at atmospheric pressure, each of the plasma generator modules comprises two parallel electrodes linearly extending at a lateral distance, one of which having a dielectric barrier; connection devices for connecting the electrodes to a high voltage source; two flat gas-conducting elements conducting a working gas between the electrodes; and a module housing delimiting the respective plasma generator module laterally along the electrodes and transversely to the electrodes. The module housings are fixed to one another or to a common module frame by means of fixation devices. The module housings are arranged side by side both in a first direction along and in a second direction transverse to the electrodes, and in such an offset way that the electrodes of the plasma generator modules partially overlap in the direction along the electrodes.