NANOCOMPOSITE GRAPHENE POLYMER MEMBRANE ASSEMBLY, AND MANUFACTURING METHOD THEREOF

A membrane hetero-structure includes a polymer layer and a single-layer or multi-layer graphene sheet disposed on the polymer layer. The membrane hetero-structure is tensioned across a frame having an opening such that both the polymer layer and the graphene sheet extend across the opening. An optio...

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Bibliographische Detailangaben
Hauptverfasser: ZELTZER, Gabriel, LEVI, Adi, SPEYER, Gavriel, NAVEH, Doron, SHAASHUA, Meir, LIU, Guoliang, GUO, Yi Chen, ARTEL, Vlada, KHAN, Assad U
Format: Patent
Sprache:eng
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Zusammenfassung:A membrane hetero-structure includes a polymer layer and a single-layer or multi-layer graphene sheet disposed on the polymer layer. The membrane hetero-structure is tensioned across a frame having an opening such that both the polymer layer and the graphene sheet extend across the opening. An optional rigid member is provided in a center of the membrane to be spaced apart from edges of the opening. The assembly of the frame and membrane hetero-structure forms an electrostatically driven micro-electro-mechanical system (MEMS) or sound generation and recording apparatus. In one instance, when a voltage signal is applied between an electrode layer parallel to the membrane and contacts on the frame that are electrically connected to the graphene sheet, the membrane hetero-structure is actuated.