X-RAY IMAGING SYSTEM AND METHOD OF X-RAY IMAGING

An x-ray imaging system includes an x-ray source configured to emit x-ray radiation towards a sample, and a primary detector configured to detect x-ray radiation from the x-ray source passing through the sample. The x-ray imaging system also includes a secondary detector configured to detect x-ray r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Weber, Thomas, Hackenschmied, Peter, Kappler, Steffen, Radicke, Marcus, Fritzler, Anja, Geithner, Peter, Freudenberger, Jörg
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An x-ray imaging system includes an x-ray source configured to emit x-ray radiation towards a sample, and a primary detector configured to detect x-ray radiation from the x-ray source passing through the sample. The x-ray imaging system also includes a secondary detector configured to detect x-ray radiation from the x-ray source scattered in the sample, and imaging optics configured to guide x-ray radiation scattered in the sample onto the secondary detector.