STACKED CHIP PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF
A manufacturing method of a stacked chip package structure includes the following steps. A first chip is disposed on a carrier, wherein the first chip has a first active surface and a plurality of first pads disposed on the first active surface. A second chip is disposed on the first chip without co...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A manufacturing method of a stacked chip package structure includes the following steps. A first chip is disposed on a carrier, wherein the first chip has a first active surface and a plurality of first pads disposed on the first active surface. A second chip is disposed on the first chip without covering the first pads and has a second active surface and a plurality of second pads disposed on the second active surface. A plurality of first stud bumps are formed on the first pads. A plurality of pillar bumps are formed on the second pads. The first chip and the second chip are encapsulated by an encapsulant, wherein the encapsulant exposes a top surface of each second stud bump. A plurality of first vias are formed by a laser process, wherein the first vias penetrate the encapsulant and expose the first stud bumps. A conductive layer is formed in the first vias to form a plurality of first conductive vias. The carrier is removed. |
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