STACKED CHIP PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

A manufacturing method of a stacked chip package structure includes the following steps. A first chip is disposed on a carrier, wherein the first chip has a first active surface and a plurality of first pads disposed on the first active surface. A second chip is disposed on the first chip without co...

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Bibliographische Detailangaben
Hauptverfasser: Fang, Li-Chih, Lin, Chun-Te, Chu, Che-Min, Lin, Ji-Cheng, Huang, Chien-Wen
Format: Patent
Sprache:eng
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Zusammenfassung:A manufacturing method of a stacked chip package structure includes the following steps. A first chip is disposed on a carrier, wherein the first chip has a first active surface and a plurality of first pads disposed on the first active surface. A second chip is disposed on the first chip without covering the first pads and has a second active surface and a plurality of second pads disposed on the second active surface. A plurality of first stud bumps are formed on the first pads. A plurality of pillar bumps are formed on the second pads. The first chip and the second chip are encapsulated by an encapsulant, wherein the encapsulant exposes a top surface of each second stud bump. A plurality of first vias are formed by a laser process, wherein the first vias penetrate the encapsulant and expose the first stud bumps. A conductive layer is formed in the first vias to form a plurality of first conductive vias. The carrier is removed.