WAFER INSPECTION APPARATUS

A wafer inspection apparatus according to one embodiment is a wafer inspection apparatus including a plurality of inspection parts arranged in a height direction and a lateral direction, and includes a pair of air circulating means disposed at both ends in a longitudinal direction of an air circulat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	AKIYAMA, Shuji, HOSAKA, Hiroki
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MECHANICAL ENGINEERING PHYSICS RANGES SEMICONDUCTOR DEVICES TESTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	A wafer inspection apparatus according to one embodiment is a wafer inspection apparatus including a plurality of inspection parts arranged in a height direction and a lateral direction, and includes a pair of air circulating means disposed at both ends in a longitudinal direction of an air circulating region including the plurality of inspection parts arranged in the lateral direction and configured to circulate air in the circulating region.