Molded Laser Package with Electromagnetic Interference Shield and Method of Making

A semiconductor device has a substrate comprising a carrier and an interposer disposed on the carrier. An electrical component is disposed over a first surface of the interposer. An interconnect structure is disposed over the first surface of the interposer. An encapsulant is deposited over the elec...

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Bibliographische Detailangaben
Hauptverfasser: Lee, Wanil, Lee, SangDuk, Lee, HeeSoo, Yang, DeokKyung, Lee, HunTeak
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device has a substrate comprising a carrier and an interposer disposed on the carrier. An electrical component is disposed over a first surface of the interposer. An interconnect structure is disposed over the first surface of the interposer. An encapsulant is deposited over the electrical component, interconnect structure, and substrate. A trench is formed through the encapsulant and interposer into the carrier. A shielding layer is formed over the encapsulant and into the trench. The carrier is removed after forming the shielding layer.