MULTILAYER HARDMASK FOR HIGH PERFORMANCE MRAM DEVICES

MULTILAYER HARDMASK FOR HIGH PERFORMANCE MRAM DEVICES

Multilayered hardmask structures are provided which can prevent degradation of the performance of a magnetic tunnel junction (MTJ) structure. The multilayered hardmask structures include at least a halogen barrier hardmask layer and an upper hardmask layer. The halogen barrier hardmask layer can pre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Arnold, John C, Rizzolo, Michael, Standaert, Theodorus E, Edelstein, Daniel C, Chung, Kisup, Chu, Isabel C
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Multilayered hardmask structures are provided which can prevent degradation of the performance of a magnetic tunnel junction (MTJ) structure. The multilayered hardmask structures include at least a halogen barrier hardmask layer and an upper hardmask layer. The halogen barrier hardmask layer can prevent halogen ions that are used to pattern the upper hardmask layer from diffusing into the MTJ structure.