SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

The present disclosure provides a semiconductor device comprising a substrate; a first III-V compound layer over the substrate; a second III-V compound layer on the first III-V compound layer; a third III-V compound layer on the second III-V compound layer; a source region on the third III-V compoun...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHANG, YAOUNG, TSAI, CHUN-LIN, CHEN, POIH, YU, JIUN-LEI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present disclosure provides a semiconductor device comprising a substrate; a first III-V compound layer over the substrate; a second III-V compound layer on the first III-V compound layer; a third III-V compound layer on the second III-V compound layer; a source region on the third III-V compound layer; a drain region on the third III-V compound layer; a first dielectric layer arranged on the second III-V compound layer through the third III-V compound layer; and a gate region on the first dielectric layer, wherein a bottom of the gate region is higher than a top surface of the first dielectric layer; the second lateral distance is larger than the first lateral distance.